Nikon Corporation (Michio Kariya, President) is pleased to announce the launch of the new Confocal NEXIV VMZ-K6555. The new Confocal NEXIV VMZ-K6555 is designed for faster and more accurate non-contact 3D measurements on larger size substrates, probe cards, and other applications requiring large stage travel. Higher magnification optics is incorporated in the design of the new Confocal NEXIV VMZ-K6555.
Product Information
Product name: Confocal NEXIV, VMZ-K6555
Start receiving orders from: March 30, 2009
Product Concept
The new Confocal NEXIV VMZ-K6555 has been designed with longer XY travel (650x550 mm) to cover the non contact 3D measurement requirements of larger substrates such as recent cutting-edge interposer substrates, and probe cards with greater accuracy and faster measurement speed. In addition, the new Confocal NEXIV VMZ-K6555 optical head employing the newly designed higher magnification objective lens (30x) can be configured for better resolution power along the XY plane.
Similar to the current Confocal NEXIV VMR-K3040ZC, the new Confocal NEXIV VMZ-K6555 continues to allow for both 2D measurements on brightfield images with a CNC 15x zooming optics and 3D measurements on confocal images. Furthermore, TTL scanning laser automatic focus and Video image automatic focus functionalities have been added to the new Confocal NEXIV VMZ-K6555 for more flexibility.
For faster measurement speed, the standard confocal optics using lower magnifications such as 1.5x, 3x and 7.5x has been redesigned and employed. The system can be configured either with built-in high magnification CF optical head or with built-in standard magnification CF optical head so that it can be optimized for broad variations of complicated and smaller measuring targets on any measuring application.
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